Its a process of elimination.
If you have the failed readings, post them and it will give an indicator of where the issue lies.
Things to check for now:
Is the multiplug connection to your MAF secure and in good condition.
It does sound as if your MAF is damaged beyond repair through cleaning. Bear in mind that that 95% of the time, the reason for a MAF failure is down to the airbox and lid letting in contamination.
Check the throttle pedal connector block behind the glove box (assuming its a CF2 model with fly by wire).. cable tie both sides of the plug tight together to maintain a good connection.
Have you checked your induction hose from the MAF body to the throttle body? Seal the ends with rubber gloves/ elastic bands and dunk test it for leaks.
Remove the spark plugs one at a time and inspect them. Are they grey/brown or sooted up or wet with fuel?
Have you checked your breather pipes and ECV parts for excessive oil deposits? Remove them and soak for a few hours in a bucket of parrafin... Allow to dry out and refit.
Beyond that I can't help at the moment